In this particular paper, The brand new lapping slurry and polishing slurry are introduced. As well as deliquescence degree of CLBO is fallen to most affordable. A whole new working know-how can also be adopted. Following rough polishing, the concentration of ultra-precision polishing slurry is greater thoroughly. So does the extremely-precision polishing speed, and also the wiping speed is quicker compared to the deliquescence speed. The CLBO crystal area roughness can accomplish 1nm and hold the floor quality effectively. Entry by means of your institution
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The average ability with the NIR laser even now has the prospective to become improved to tens of watts for instance 70 W [26] In case the double-pass configuration may very well be utilized with the Yb:YAG SCF amplifier stage. As a result, In case the conversion performance of 31% from NIR to DUV could possibly be nevertheless managed at this larger ability problem, the normal output power in the DUV laser at 258 nm could be over 20 W, which might be described as a amazing ability degree to the DUV laser and bring about the unanticipated DUV laser machining benefits. Also, for prime-electric power DUV laser, the UV problems with the nonlinear crystal, such as the windows for CLBO crystal as well as the mirrors, is yet another essential parameter for long term and secure operation.
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On the opposite aspect, the power scaling of your NIR laser is yet another facet to boost the average energy in the 193-nm DUV laser. Because of the insufficient the significant-electrical power amplification solution from the NIR laser (one example is at 1553 nm), nonlinear frequency procedures including optical parameter oscillation (OPO) may be applied to make a wavelength converter by shifting the wavelength from one μm to the specified wavelength along with acquiring relative higher electric power [21]. Not long ago, a diamond Raman laser confirmed its capacity in acquiring a large power as well as a large conversion efficiency within the 1st Stokes with the one-μm laser [22,23], which suggests the likelihood being utilized while in the 193-nm DUV laser generation on account of its higher Raman gain and huge frequency shift.
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The heartbeat length of the 2nd Stokes gentle was shortened to five ns as demonstrated in Determine 7a, an individual-shot photograph with the oscilloscope, which can be a standard phenomenon in Raman laser [44] when the pulse length of your pump laser was 10 ns.
Also, combining the strong-condition laser with other nonlinear system for instance stimulated Raman scattering, NIR lasers may very well be obtained at new wavelengths with higher electric power and high beam high quality, which was examined because of the evidence-of-basic principle experiment. This Raman laser plan provides a brand new route to the large-electrical power DUV laser, Specially for the wavelength of 193 nm.
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The development with the 193-nm laser was shown by stages of SFG. So as to scale the DUV laser energy effectively, a whole new concept in the 193-nm DUV laser technology is introduced depending on the diamond Raman laser.